Product classification
Wafter Megasonic single side Brushing & Cleaning Spin-Dryer
Classification:
Monolithic cleaning equipment
- Product Description
-
Applicable parts：
6"/8“Sapphire or SiC Wafer
Capacity： 60s/pcs
Procedure Flow：
Load→Location→Rotation,brushing,cleaning,two-fluid spraying(Si side)→Turn over 180 degree→Rotation,brushing,cleaning,megasonic spraying(C side)→Rotation,Spin-Drying→Unload Major Material： Metal Frame+PP white board Transportation： Wafer transported by clean robotic hand Process effect：
a.particle size0.3~0.5um,remove %>90%or <200e.a;
b.particle size0.5~1um,remove%>95%or <10e.a。
PS:inspection machine is for Candela or SICA
Contact Us
Address: 1001 Jingang Avenue, Zhangjiagang City, Jiangsu Province
Follow us