Chemical Mechanic Polishing Cleaner-Shengda Semiconductor Equipment (Jiangsu) Co., Ltd.

Product classification

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Chemical Mechanic Polishing Cleaner

Classification:

Wet process equipment

Applicable parts：	6”1 Cassette,8”1 pc Cassette
Capacity：	1 batch/10min
Procedure flow：	Load(Manual)→Ultrasonic Cleaning Agent Tank→QRD Tank→Ultrasonic Cleaning Agent Tank→QDR Tank→HF Tank →QDR Tank →Unload(Manual)
Major material：	Metal frame SUS 304,Ice-Cream PP board,the tank uses PPN+SUS316
Transportation：	Manual
Step time：	Based on process,Adjustable
Process effect：	Removal residual slurry and larger particle on the surface of wafer
Others：	Customized:Semiautomatic or manual

Address: 1001 Jingang Avenue, Zhangjiagang City, Jiangsu Province

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