Double-Sides Mechanic Polishing Cleaner-Shengda Semiconductor Equipment (Jiangsu) Co., Ltd.

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Double-Sides Mechanic Polishing Cleaner

Classification:

Wet process equipment

Applicable parts：	6"1 Cassette,8"1 pc Cassette
Capacity：	1 batch/10min
Procedure flow：	Load(Manual)→QDR Tank→OF Tank→Ultrasonic Cleaning Agent Tank→Ultrasonic Cleaning Agent Tank→QDR Tank→Unload (Manual)
Major material：	Metal frame SUS 304+Ice-cream PP board,Tank uses PPN/SUS316
Transportation：	Manual
Step time：	Based on process,Adjustable
Process effect：	Removal residual slurry and larger particle on the surface of wafer
Others：	Customized:Semiautomatic or manual

Address: 1001 Jingang Avenue, Zhangjiagang City, Jiangsu Province

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