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8”/12
8”/12

8”/12" Wafer Deguming, Spliting & Cleaning Unit

Classification:

Tank cleaning equipment

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  • Product Description
  •  Applicable parts： 8”/12”Wafer
     Capacity： 400~450 PCS/h
        Procedure  Flow： Load→QDR→Ultrasonic alkali Cleaning-→Deguming
    Tank→Spliting Tank→Inserting mechanism→Scan &
    Transportation mechanism→ (Ultrasonic alkali Tank
    1→Ultrasonic alkali Tank2→Rinsing Tank1→Rinsing Tank
    with slow lifting 2→Drying Tank 1→Drying Tank 2→Unload--Buffer)
        Major Material： Metal Frame,Tank use SUS316 mirror plate
        Transportation： Robotic arm Transporation
     Step Time： Based on process,adjustable
    Others： Customized:Semiautomatic or manual

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