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8 "&12"Quartz tube (Use for Slicon wafer heating) Cleaner

Classification:

Component cleaning equipment

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  • Product Description
  • Applicable parts： 1-1.7 m length,8”,12”Quartz tube(use for Slicon wafer heating)&Quartz parts
    Capacity： Customerized
    Procedure  flow： Manual Load→Quartz tube rotation,chemicals recycling clean→Chemicals Drain to tank of acid storage→DIW clean→N2 Dry→Manual Unload
    Major material： Metal frame SUS 304,the tank uses PPN or PVDF
    Transportation： Manual
    Step  time： Based on process,Adjustable
    Process effect： Remove contaminant on the surface of Quartz parts or Tube
    Others： Customized:Semiautomatic or manual

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